Project VV 2014 (APVV)

Project reference number: APVV-14–0076

Project title: MEMS structures based on compliant mechanisms

Applicant and beneficiary: Slovak University of Technology in Bratislava,Faculty of Electrical Engineering and Computer Science

Name of the responsible representative: prof., Ing. Redhammer Robert, PhD.

Start of the project (MM/YYY): 07/2015

End of the project (MM/YYY): 06/2019

Annotation

The project focuses on the analysis, synthesis and design of MEMS-based electromechanical sensors with the capability of wire-free transmission of sensed quantity information. The solution of the project focuses on the investigation of the appropriate topology of the structures, especially in the context of the design of the required parameters of MEMS sensors. The comprehensive design includes the parallel design of both the mechanical and electrical parts of the sensor. In the mechanical design, the emphasis is mainly on the modelling analysis and linearization of the MEMS structure properties. In the electrical domain, the project solution focuses on analyzing the appropriate electromagnetic action for information transfer and complementing the sensor with electrical elements so as not to degrade the desired mechanical properties. In the electrical domain, the mechanical topology of the MEMS structure is considered with its direct use for the application of electrical elements.

Co-researcher organisations

The project has been planned and is approved in such a way that, in addition to the applicant, the following are project partners: Institute of Computer Science Slovak Academy of Sciences (SAV), Bratislava RMC s.r.o., Nová Dubnica

Objectives

a/ Proposal – MEMS (micro-electro-mechanical-structures-sensors) The subject of investigation are design methods and means for analysis, modelling and simulation of MEMS properties. The solution focuses on 1D and 2D sensors of mechanical quantities (force, contact, pressure, temperature, displacement / deformation, … ).

b/ Energy and signal transfer in MEMS (non-contact/non-conductive) The possibilities of transferring energy and signals „from“ and „to“ the MEMS structure are investigated, focusing in particular on the principle of energy transfer via the el-magnetic field.

c/ Design and verification of MEMS parameters Selected electrical and mechanical prototypes of MEMS sensors of mechanical quantities are realized. Since it is a combination of high frequency, mechanical systems and data transmission between the MEMS structure and the environment, it is necessary to master not only the technology and fabrication of the MEMS structure (laser cutting, deposition of electronic structures, etc.) but also the creation of a closed environment, generating the electromagnetic wave necessary for the operation of the MEMS itself.

Conclusion

The project is well underway, with the following stages: a/ Design of the MEMS, b/ Energy and signal transfer in the MEMS.